Advantages：

1. High production capacity.
182: 14500 pieces/h.
210: 12500 pieces/h.
2. High efficiency.
Small water change for 30 min/time.
Large water change for 90 min/time.
3. Energy saving.
Water consumption: 182 pieces, 1.4T/10000 pieces.
210 pieces, 1.7T/10000 pieces.
Electricity consumption: 182 pieces, 135Kwh/10000 pieces.
210 pieces, 153Kwh/10000 pieces.

Parameters：

1. Equipment length, width, height: 20m*3.1m*3.5m (excluding cutting belt line).
2. Total power: 550KW (customized according to actual process).
3. Power supply: 380V±10%, frequency 50HZ, Three-phase five-wire system.
4. Air pressure: 0.6MPa.
5. Water pressure: normal city water.
6. Usage environment: (ambient temperature-10~40℃) (humidity: relative humidity≤80%).
*The above parameters are subject to the actual product.

Applications：

Applicable silicon wafer dimensions: 166mm-230mm.
Applicable silicon wafer thickness: 100μm-160μm.